VNA calibration

IEEE Microwave Magazine

Volumn 9, Issue 3, 2008, Pages 86-99

  Rumiantsev, Andrej ^a   Ridler, Nick ^b  

^a SUSS MicroTec Lithography GmbH   (United States)

^b NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; DYNAMIC PROGRAMMING; MATHEMATICAL MODELS; REFLECTOMETERS; SYSTEMATIC ERRORS; VECTOR QUANTIZATION;

DOUBLE-REFLECTOMETER PRINCIPLE; HARDWARE IMPROVEMENTS; HIGH-PRECISION DEVICES; MEASUREMENT RECEIVERS;

ELECTRIC NETWORK ANALYZERS;

EID: 44049085108     PISSN: 15273342     EISSN: None     Source Type: Journal    
DOI: 10.1109/MMM.2008.919925     Document Type: Article

References (79)

1. B. O. Weinschel Air-filled coaxial lines as absolute impedance standards Microwave J. 7 47 50 Apr. 1964
2. I. A. Harris R. E. Spinney The realization of high-frequency impedance standards using air-spaced coaxial lines IEEE Trans. Instrum. Meas. 13 4 265 272 1964
3. L. Essen K. D. Froome The refractive indices and dielectric constants of air and its principal constituents at 24,000 Mc/s Proc. Phys. Soc. 64B 10 862 875 Proc. Phys. Soc. 1951
4. K. H. Wong Using precision coaxial air dielectric transmission lines as calibration and verification standards Microwave J. 31 83 92 Dec. 1988
5. A. E. Sanderson A radically new coaxial connector for high-precision measurements GR Experimenter 37 1 6 Feb.-Mar. 1963
6. F. R. Huber H. Neubauer The Dezifix connector—A sexless precision connector for microwave techniques Microwave J. VI 79 85 June 1963
7. IEEE standard for precision coaxial connectors IEEE Trans. Instrum. Meas. 17 3 204 204 1968 G-IM Subcommittee
8. R. A. Hackborn An automatic network analyzer system Microwave J. 11 45 52 May 1968
9. S. F. Adam A new precision automatic microwave measurement system IEEE Trans. Instrum. Meas. 17 4 308 313 1968
10. S. F. Adam G. R. Kirkpatrick N. J. Sladek S. T. Bruno A high performance 3.5 mm connector to 34 GHz Microwave J. 19 50 54 July 1976
11. K. Howell K. Wong DC to 110 GHz measurements in coax using the 1 mm connector Microwave J. 42 22 34 July 1999
12. G. F. Engen C. A. Hoer Thru-reflect-line: An improved technique for calibrating the dual six-port automatic network analyzer IEEE Trans. Microwave Theory Tech. 27 12 987 993 1979
13. C. A. Hoer G. F. Engen On-line accuracy assessment for the dual six-port ANA: extension to nonmating connectors IEEE Trans. Instrum. Meas. 36 524 529 June 1987
14. G. F. Engen The six-port reflectometer: An alternative network analyzer IEEE Trans. Microwave Theory Tech. 25 12 1075 1080 1977
15. D. Williams R. Marks K. Phillips T. Miers Progress toward MMIC on-wafer standards Proc. 36th ARFTG Microwave Measurements Conf.-Fall 73 83 Proc. 36th ARFTG Microwave Measurements Conf.-Fall 1990
16. D. J. Bannister M. Perkins Traceability for on-wafer S-parameter IEE Proc. Science, Measurement and Technology 139 5 232 234 IEE Proc. Science, Measurement and Technology 1992
17. International Vocabulary of Basic and General Terms Used in Metrology 2nd 1993 International Organization for Standardization Switzerland, Geneva
18. B. P. Hand Developing accuracy specifications for automatic network analyzer systems Hewlett-Packard J. 21 16 19 Feb. 1972
19. J. Fitzpatrick Error models for system measurement Microwave J. 21 63 66 May 1978
20. S. Rehnmark On the calibration process of automatic network analyzer systems (short papers) IEEE Trans. Microwave Theory Tech. 22 4 457 458 1974
21. H. V. Shurmer Calibration procedure for computer-corrected s parameter characterisation of devices mounted in microstrip Electronics Lett. 9 14 323 324 1973
22. D. Rytting Advances in microwave error correction techniques Proc. Hewlett-Packard RF and Microwave Measurement Symp. and Exhibition 6201 6302 Proc. Hewlett-Packard RF and Microwave Measurement Symp. and Exhibition 1987-June
23. H. Heuermann GSOLT: The calibration procedure for all multi-port vector network analyzers MTT-S Int. Microwave Symp. Dig. 1815 1818 MTT-S Int. Microwave Symp. Dig. 2003
24. N. R. Franzen R. A. Speciale A new procedure for system calibration and error removal in automated S-parameter measurements Proc. 5th European Microwave Conf. 69 73 Proc. 5th European Microwave Conf. 1975
25. H. J. Eul B. Schiek A generalized theory and new calibration procedures for network analyzer self-calibration IEEE Trans. Microwave Theory Tech. 39 4 724 731 1991
26. R. B. Marks Formulations of the basic vector network analyzer error model including switch-terms Proc. 50th ARFTG Microwave Measurements Conf.-Fall 115 126 Proc. 50th ARFTG Microwave Measurements Conf.-Fall 1997
27. S. Vandenberghe D. Schreurs G. Carchon B. Nauwelaers W. De Raedt Identifying error-box parameters from the twelveterm vector network analyzer error model Proc. 60th ARFTG Microwave Measurements Conf.-Fall 157 165 Proc. 60th ARFTG Microwave Measurements Conf.-Fall 2002
28. H. J. Eul Methoden zur Kalibrierung von heterodynen und homodynen Netzwerkanalysatoren 1990 Ruhr-Universitaet Bochum
29. In-fixture microstrip device measurements using TRL* calibration 1991 Hewlett-Packard Company CA, Santa Clara
30. D. Zelinka M. Shaw A comparative study of TOSL, TRL, and TRL* network analyzer calibration techniques, using microstrip test fixtures Proc. 46th ARFTG Microwave Measurements Conf.-Fall 9 18 Proc. 46th ARFTG Microwave Measurements Conf.-Fall 1995
31. R. A. Speciale N. R. Franzen Super-TSD, a generalization of the TSD network analyzer calibration procedure, covering n-port measurements with leakage MTT-S Int. Microwave Symp. Dig. 114 117 MTT-S Int. Microwave Symp. Dig. 1977
32. V. Teppati A. Ferrero On-wafer calibration algorithm for partially leaky multiport vector network analyzers IEEE Trans. Microwave Theory Tech. 53 11 3665 3671 2005
33. H. Heuermann B. Schiek Results of network analyzer measurements with leakage errors-corrected with direct calibration techniques IEEE Trans. Instrum. Meas. 46 5 1120 1127 1997
34. V. Teppati A. Ferrero D. Parena U. Pisani A simple calibration algorithm for partially leaky model multiport vector network analyzers Proc. 65th ARFTG Microwave Measurements Conf.-Spring 5 9 Proc. 65th ARFTG Microwave Measurements Conf.-Spring 2005
35. W. Kruppa K. F. Sodomsky An explicit solution for the scattering parameters of a linear two-port measured with an imperfect test set IEEE Trans. Microwave Theory Tech. MTT-19 1 122 123 1971
36. S. Padmanabhan P. Kirby J. Daniel L. Dunleavy Accurate broadband on-wafer SOLT calibrations with complex load and thru models Proc. 61st ARFTG Microwave Measurements Conf.-Spring 5 10 Proc. 61st ARFTG Microwave Measurements Conf.-Spring 2003
37. D. Blackham K. Wong Latest advances in VNA accuracy enhancements Microwave J. 48 78 94 July 2005
38. N. Ridler N. Nazoa Using simple calibration load models to improve accuracy of vector network analyser measurements Proc. 67th ARFTG Microwave Measurements Conf.-Spring 104 110 Proc. 67th ARFTG Microwave Measurements Conf.-Spring 2006
39. D. Blackham Application of weighted least squares to OSL vector error correction Proc. 61st ARFTG Microwave Measurements Conf.-Spring 11 21 Proc. 61st ARFTG Microwave Measurements Conf.-Spring 2003
40. M. J. Salter N. M. Ridler P. M. Harris Over-determined calibration schemes for RF network analysers employing generalised distance regression Proc. 62nd ARFTG Microwave Measurements Conf.-Fall 127 142 Proc. 62nd ARFTG Microwave Measurements Conf.-Fall 2003
41. R. B. Marks A multiline method of network analyzer calibration IEEE Trans. Microwave Theory Tech. 39 7 1205 1215 1991
42. D. F. Williams J.C.M. Wang U. Arz An optimal vector-network-analyzer calibration algorithm IEEE Trans. Microwave Theory Tech. 51 12 2391 2401 2003
43. D. F. Williams R. B. Marks A. Davidson Comparison of on-wafer calibrations Proc. 38th ARFTG Microwave Measurements Conf.-Fall 68 81 Proc. 38th ARFTG Microwave Measurements Conf.-Fall 1991
44. K. J. Silvonen A general approach to network analyzer calibration IEEE Trans. Microwave Theory Tech. 40 4 754 759 1992
45. H. Heuermann B. Schiek A generalization of the Txx network analyzer self-calibration procedure Proc. 22nd European Microwave Conf. 907 912 Proc. 22nd European Microwave Conf. 1992
46. H. Heuermann B. Schiek Robust algorithms for Txx network analyzer self-calibration procedures IEEE Trans. Instrum. Meas. 43 1 18 23 1994
47. H. J. Eul B. Schiek Thru-match-reflect: One result of a rigorous theory for de-embedding and network analyzer calibration Proc. 18th European Microwave Conf. 909 914 Proc. 18th European Microwave Conf. 1988
48. D. F. Williams R. B. Marks LRM probe-tip calibrations using nonideal standards IEEE Trans. Microwave Theory Tech. 43 2 466 469 1995
49. R. Doerner A. Rumiantsev Verification of the wafer-level LRM+ calibration technique for GaAs applications up to 110 GHz Proc. 65th ARFTG Microwave Measurements Conf.-Spring 15 19 Proc. 65th ARFTG Microwave Measurements Conf.-Spring 2005
50. A. Ferrero U. Pisani Two-port network analyzer calibration using an unknown 'thru' IEEE Microwave Guided Wave Lett. 2 12 505 507 1992
51. A. Ferrero U. Pisani QSOLT: A new fast calibration algorithm for two port S parameter measurements Proc. 38th ARFTG Microwave Measurements Conf.-Fall 15 24 Proc. 38th ARFTG Microwave Measurements Conf.-Fall 1991
52. H. J. Eul B. Schiek Reducing the number of calibration standards for network analyzer calibration IEEE Trans. Instrum. Meas. 40 4 732 735 1991
53. J. A. Jargon R. B. Marks D. K. Rytting Robust SOLT and alternative calibrations for four-sampler vector network analyzers IEEE Trans. Microwave Theory Tech. 47 10 2008 2013 1999
54. A. Davidson K. Jones E. Strid LRM and LRRM calibrations with automatic determination of load inductance Proc. 36th ARFTG Microwave Measurements Conf.-Fall 57 63 Proc. 36th ARFTG Microwave Measurements Conf.-Fall 1990
55. R. Doerner Evaluation of wafer-level LRRM and LRM+ calibration techniques Proc. 69th ARFTG Microwave Measurements Conf.-Spring 86 89 Proc. 69th ARFTG Microwave Measurements Conf.-Spring 2007
56. J. V. Butler D. K. Rytting M. F. Iskander R. D. Pollard M. A. Vanden Bossche 16-term error model and calibration procedure for on-wafer network analysis measurements IEEE Trans. Microwave Theory Tech. 39 12 2211 2217 1991
57. K. J. Silvonen Calibration of 16-term error model [microwave measurement] Electronics Lett. 29 17 1544 1545 1993
58. H. Heuermann B. Schiek 15-term self-calibration methods for the error-correction of on-wafer measurements IEEE Trans. Instrum. Meas. 46 5 1105 1110 1997
59. H. Heuermann B. Schiek Results of network analyzer measurements with leakage errors corrected with the TMS-15-term procedure IEEE MTT-S Int. Microwave Symp. Dig. 3 1361 1364 IEEE MTT-S Int. Microwave Symp. Dig. 1994
60. K. Silvonen LMR 16—A self-calibration procedure for a leaky network analyzer IEEE Trans. Microwave Theory Tech. 45 7 1041 1049 1997
61. A. Ferrero U. Pisani K. J. Kerwin A new implementation of a multiport automatic network analyzer IEEE Trans. Microwave Theory Tech. 40 11 2078 2085 1992
62. J. Martens Multiport SOLR calibrations: Performance and an analysis of some standards dependencies Proc. 62nd ARFTG Microwave Measurements Conf.-Fall 205 213 Proc. 62nd ARFTG Microwave Measurements Conf.-Fall 2003
63. J. Martens D. Judge J. Bigelow VNA calibration modifications and hybridizations for simplified high frequency multiport/differential measurements ARMMS Conf. Dig. ARMMS Conf. Dig. 2005-Apr.
64. L. Hayden A hybrid probe tip calibration of multiport vector network analyzers Proc. 68th ARFTG Microwave Measurements Conf.-Fall 176 183 Proc. 68th ARFTG Microwave Measurements Conf.-Fall 2006
65. H. Heuermann Multi-port calibration techniques for differential parameter measurements with network analyzers Proc. European Microwave Conf., Rohde and Schwarz Workshop 1 6 Proc. European Microwave Conf., Rohde and Schwarz Workshop 2003-Oct.
66. H. Heuermann A. Rumiantsev S. Schott Advanced on-wafer multiport calibration methods for mono-and mixed-mode device characterization Proc. 63rd ARFTG Microwave Measurements Conf.-Spring 91 96 Proc. 63rd ARFTG Microwave Measurements Conf.-Spring 2004
67. A. Rumiantsev H. Heuermann S. Schott A robust broadband calibration method for wafer-level characterization of multi-port devices Proc. 69th ARFTG Microwave Measurements Conf.-Spring 56 60 Proc. 69th ARFTG Microwave Measurements Conf.-Spring 2007
68. ZVA Vector Network Analyzer 2007 Rohde and Schwartz Germany, Munich
69. Dual-source 4-port network analyzers true-mode stimulus application (TMSA) 2007 Agilent CA, Santa Clara
70. J. Simon True differential stimulus gives additional insight into nonlinear amplifier behavior Proc. 69th Microwave Measurements Conf.-Spring 33 41 Proc. 69th Microwave Measurements Conf.-Spring 2007
71. J. Dunsmore K. Anderson D. Blackham Complete pure-mode balanced measurement system Proc. 2007 IEEE/MTT-S Int. Microwave Symp. 1485 1488 Proc. 2007 IEEE/MTT-S Int. Microwave Symp. 2007
72. General Requirements for the Competence of Testing and Calibration Laboratories 2005 ISO/IEC 17025:2005
73. R. A. Dudley N. M. Ridler Traceability via the Internet for microwave measurements using vector network analyzers IEEE Trans. Instrum. Meas. 52 1 130 134 2003
74. R. W. Beatty Calculated and measured S11, S21, and group delay for simple types of coaxial and rectangular waveguide two-port standards Dec. 1974 CO, Boulder 657
75. M. A. Maury G.R. Simpson Two-port verification standards in 3.5 mm and 7 mm for vector network analyzers Microwave J. 27 101 110 June 1984
76. R. Tucker The history of the Automatic RF Techniques Group IEEE Microwave Mag. 8 4 69 74 2007
77. R. A. Ginley Confidence in VNA measurements IEEE Microwave Mag. 8 4 54 58 2007
78. G. D. Jones N. M. Ridler Comparison assesses the quality of network measurements Microwaves & RF 34 101 104 Jan. 1995
79. M. J. Maddock N. M. Ridler ANAMET-991: TDNA measurement comparison exercise 2001 U.K., Teddington 031 ANAMET