Temperature dependence of the dielectric function of silicon using in situ spectroscopic ellipsometry

Thin Solid Films

Volumn 233, Issue 1-2, 1993, Pages 166-170

  Vuye, G ^a   Fisson, S ^a   Nguyen Van, V ^a   Wang, Y ^a   Rivory, J ^a   Abeles F ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES; ELLIPSOMETRY; SPECTROSCOPIC ANALYSIS; THERMAL EFFECTS;

DIELECTRIC FUNCTIONS; SPECTROSCOPIC ELLIPSOMETRY;

SEMICONDUCTING SILICON;

EID: 43949163933     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(93)90082-Z     Document Type: Article

References (10)

1. Two-channel polarization modulation ellipsometer