Development of the single ion beam induced charge (SIBIC) imaging technique using the single ion microprobe system

Nuclear Inst. and Methods in Physics Research, B

Volumn 93, Issue 1, 1994, Pages 82-86

  Meishoku, Koh ^a   Ken ichi, Hara ^a   Katsuyuki, Horita ^a   Bungo, Shigeta ^a   Takashi, Matsukawa ^a   Atsushi, Kishida ^a   Takashi, Tanii ^a   Makoto, Goto ^a   Iwao, Ohdomari ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 43949158954     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(94)95460-7     Document Type: Article

References (9)

1. Site Dependence of Soft Errors Induced by Single-Ion Hitting in 64 kbit Static Random Access Memory (SRAM)
2. Evaluation of single-event immunity in micron-size device area using single-ion microprobe technique