Using lasers to dice thin silicon wafers

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Volumn 17, Issue 3, 2008, Pages

  Perrottet, Delphine ^a,b   Dunne, Kali ^a,b   Walsh, Gillian ^a,b   Diggin, Billy ^a,b  

^a XSIL LTD

^b Silverstone House   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

GALVANOMETERS; LASER APPLICATIONS; OPTIMIZATION; THIN FILMS;

LASER DICING; ULTRA-FAST GALVANOMETER;

SILICON WAFERS;

EID: 43949116257     PISSN: 10650555     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (0)