Advanced metallization needs integrate copper to memory

Semiconductor International

Volumn 31, Issue 5, 2008, Pages 26-33

  Kumar, Niranjan ^a   Moraes, Kevin ^a   Narasimhan, Murali ^a   Gopalraja, Prabu ^a  

^a APPLIED MATERIALS INC   (United States)

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Indexed keywords

EID: 43749117519     PISSN: 01633767     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (2)