Layout verification in the era of process uncertainty: Target process variability bands vs actual process variability bands

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6925, Issue , 2008, Pages

  Torres, J Andres ^a  

^a MENTOR GRAPHICS CORPORATION   (United States)

Author keywords

DFM; Layout portability; Layout verification; Lithography checks

Indexed keywords

LAYOUT PORTABILITY; LAYOUT VERIFICATION; LITHOGRAPHY CHECKS;

MATHEMATICAL MODELS; PROBLEM SOLVING; UNCERTAINTY ANALYSIS; VERIFICATION;

PROCESS CONTROL;

EID: 43649105482     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.769287     Document Type: Conference Paper

References (6)