Comparison of the piezoelectric MEMS generators with interdigital electrodes and laminated electrodes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6933, Issue , 2008, Pages

  Lee, Bor Shiun ^a   Lin, Shun Chi ^a   Wu, Wen Jong ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Interdigital electrodes; Laminated electrodes; MEMS generator; Power harvesting

Indexed keywords

CANTILEVER BEAMS; ELECTROCHEMICAL ELECTRODES; LAMINATED COMPOSITES; PIEZOELECTRIC DEVICES; SILICON; WIRELESS SENSOR NETWORKS;

INTERDIGITAL ELECTRODES; LAMINATED ELECTRODES; MEMS GENERATORS; POWER HARVESTING;

MEMS;

EID: 43649097556     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.776406     Document Type: Conference Paper

References (9)

1. Chandrakasan A, Amirtharajah R, Goodman J and Rabiner W 1998 Trends in low power digital signal processing Int. Symp. Circuits Syst. 4 604-7
2. Roundy S, Steingart D, Frechette L, Wright P and Rabaey J 2004 Power sources for wireless sensor networks LectureNotes Comput. Sci. 2920 1-17
3. Roundy S, Leland E S, Baker J, Carleton E, Reilly E, Lai E, Otis B, Rabaey J M, Wright P K and Sundararajan V 2005 Improving power output for vibration-based energy scavengers IEEE Pervasive Comput. 4 28-36
4. Sodano H A, Inman D J and Park G 2004 A review of power harvesting from vibration using piezoelectric materials Shock Vib. Dig. 36 197-205
5. Williams, C. B. Yates, R. B. 1996. "Analysis of A Micro-Electric Generator for Microsystem," Sensor and Actuator A52, pp.8-11.
6. Jeon,Y. B. Sood, R. Lodewyk Steyn, Kim,S. G. 2003 "Energy Harvesting MEMS Devices Based on d33 Mode Piezoelectric Pb(Zr,Ti)O3 Thin Film Cantilever," CIRP Seminar on Micro and Nano Technology, Copenhagen, Denmark, 13-14 November
7. Jeon Y B, Sood R, Jeong J H and Kim S G 2005 MEMS power generator with transverse mode thin film PZT Sensors Actuators A 122 16-22
8. Roundy S, Wright P K and Rabaey J 2003 A study of low level vibrations as a power source for wireless sensor nodes Comput. Commun. 26 1131-44
9. Fang H B, Liu J Q, Xu Z Y, Dong L, Chen D, Cai B C and Liu Y 2006 A MEMS-based piezoelectric power generator for low frequency vibration energy harvesting Chin. Phys. Lett. 23 732-4