Effect of deposition geometry on structural, electrical and optical properties of ZnO:Al films by magnetron sputtering

Vacuum

Volumn 82, Issue 10, 2008, Pages 994-997

  Czternastek, Halina ^a  

^a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

Author keywords

Al doped zinc oxide; Reactive magnetron sputtering; Transparent oxides

Indexed keywords

ELECTRIC PROPERTIES; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES;

AL-DOPED ZINC OXIDE; TRANSPARENT OXIDES;

ZINC OXIDE;

EID: 43649094016     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.01.036     Document Type: Article

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