ISFET microsensors HfO2 based for biomedical applications

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2006, Pages 185-189

  Moldovan, Carmen ^a   Iosub, Rodica ^a   Modreanu, Mircea ^b   Ulieru, Dumitru ^c   Firtat, Bogdan ^a   Ion, Marian ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b UNIVERSITY COLLEGE CORK   (Ireland)

^c ROMES SA   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ION SENSITIVE FIELD EFFECT TRANSISTORS; MEDICAL APPLICATIONS; MICROMACHINING; MICROSENSORS; SENSITIVITY ANALYSIS; TRANSDUCERS;

MICROMACHINED TRANSDUCERS; SENSITIVE LAYERS;

HAFNIUM COMPOUNDS;

EID: 43549112040     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2006.283964     Document Type: Conference Paper

References (4)