Development of patent filing figures in the field of microelectromechanical devices

Proceedings of the International Semiconductor Conference, CAS

Volumn 2, Issue , 2006, Pages 351-354

  Meister, M ^a   McGinley, C ^a  

^a EUROPEAN PATENT OFFICE   (Germany)

Author keywords

MEMS; Micromechanics; Patent statistics

Indexed keywords

MEMS; PATENTS AND INVENTIONS; PRESSURE SENSORS;

EUROPEAN PATENT OFFICE (EPO); PATENT FILING FIGURES;

MICROMECHANICS;

EID: 43549100407     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2006.284017     Document Type: Conference Paper

References (5)