Lanthanum oxide for gate dielectric insulator

2005 IEEE Conference on Electron Devices and Solid-State Circuits, EDSSC

Volumn , Issue , 2005, Pages 161-166

  Kakushima, K ^a   Tsutsui, K ^a   Hattori, T ^b   Iwai, H ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b TOKYO CITY UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC INSULATORS; GATE DIELECTRICS; MOSFET DEVICES; RARE EARTHS;

GATE DIELECTRIC INSULATORS; LANTHANUM OXIDE; SPACE CHARGE LIMITED CURRENT (SCLC);

LANTHANUM COMPOUNDS;

EID: 43549089926     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EDSSC.2005.1635231     Document Type: Conference Paper

References (16)