Electrocapillary piston motion and a prototype of phase-manipulating micromirror

Journal of Microelectromechanical Systems

Volumn 13, Issue 4, 2004, Pages 620-627

  Wan, Zhi Liang ^a   Feinerman, Alan ^a   Zeng, Hong Jun ^a   Friedman, Gary ^b  

^a UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

^b IEEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE OPTICS; CAPILLARY FLOW; ELECTROLYTES; HIGH SPEED CAMERAS; MATHEMATICAL MODELS; MERCURY (METAL); MIRRORS; POTASSIUM COMPOUNDS;

ELECTROCAPILLARY EFECT; ELECTROCAPILLARY PISTON MOTION; EQUILIBRIUM STATE; MERCURY DROPLET; METAL PLATED MICROHOLE; PHASE MANIPULATING MICROMIRROR;

MICROELECTROMECHANICAL DEVICES;

EID: 4344708331     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.832186     Document Type: Article

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