Development of the CAE-assisted nano-indentation method for the evaluation of the anisotropic mechanical-properties of thin films

Journal of Materials Processing Technology

Volumn 151, Issue 1-3 SPEC. ISS., 2004, Pages 263-267

  Sasaki, T ^a,b   Yang, M ^b   Fukushima, S ^b   Tsukano, R ^b  

^a Tokyo Metropol Tama S/M SBPC   (Japan)

^b TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Anisotropy; CAE assisted nano indentation; FEM; Mechanical properties; Thin metal film

Indexed keywords

BERKOVICH INDENTER; MACRO MATERIALS; NANO-INDENTATION; THIN METAL FILMS;

ANISOTROPY; COMPUTER AIDED ENGINEERING; CRYSTAL STRUCTURE; ELASTIC MODULI; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

THIN FILMS;

EID: 4344703154     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2004.04.072     Document Type: Article

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