The 3D measurement and analysis of high precision surfaces using con-focal optical methods

IEICE Transactions on Electronics

Volumn E87-C, Issue 8, 2004, Pages 1261-1267

  McBride, John ^a   Maul, Christian ^b  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

^b TaiCaan Technologies Ltd   (United Kingdom)

Author keywords

3D surface scanning; Con focal methods; Contact erosion; MEMS; Micro metrology

Indexed keywords

ELECTRIC CONTACTS; EROSION; FOCUSING; LASER APPLICATIONS; MICROMACHINING; SURFACE PROPERTIES; SURFACE ROUGHNESS;

CON-FOCAL METHODS; CONTACT EROSION; MEMS; MICROMETROLOGY; SURFACE SCANNING;

MICROELECTROMECHANICAL DEVICES;

EID: 4344700918     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (8)

1. J.W. McBride, K.J. Cross, and S.M. Sharkh, "The evaluation of arc erosion on electrical contacts using 3D surface profiles," IEEE Trans. Compon. Packag. Manuf. Technol., vol.19, no.1, pp.87-97, March 1996.
2. J.W. McBride, "The volumetric erosion of electrical contacts," IEEE Trans. CPT, vol.23, no.2, pp.211-221, June 2000.
3. J.W. McBride, "A review of volumetric erosion studies in low voltage electrical contacts," IEICE Trans. Electron., vol.E86-C, no.6, pp.908-914, June 2003.
4. J.W. McBride, "A review of surface erosion measurements in low voltage switching devices," ICEC 2002, pp.462-470, Zurich, Sept. 2002.
5. K.J. Stout, Three-Dimensional Surface Topography: Measurement, Interpretation and Applications, Penton Press, London, 1994.
6. TaiCaan Technologies Ltd., www.taicaan.com
7. M. Jung, K.J. Cross, J.W. McBride, and M. Hill, "A method for the selection of algorithms for form characterisation of nominally spherical surfaces," Precision Engineering, vol.24, pp.127-138, 2000.
8. M. Hill, M. Jung, and J.W. McBride, "Separation of form from orientation in 3D measurements of aspheric surfaces with no datum," Int. J. Mach. Tools Manuf., vol.42, no.4, pp.457-466, 2002.