C-DIC: A new microscopy method for rational study of phase structures in incident light arrangement

Thin Solid Films

Volumn 462-463, Issue SPEC. ISS., 2004, Pages 257-262

  Danz, Rainer ^a,b   Gretscher, Peter ^a  

^a CARL ZEISS SMT AG   (Germany)

^b Materials Microscopy   (Germany)

Author keywords

Azimuth effect; Circular polarized light; Differential interference contrast

Indexed keywords

AZIMUTH EFFECT; CIRCULAR POLARIZED LIGHT; DIFFERENTIAL INTERFERENCE CONTRAST; PHASE STRUCTURES;

ELECTRIC FIELD MEASUREMENT; EXCIMER LASERS; IMAGE ANALYSIS; INFORMATION ANALYSIS; MAGNETIC FIELD MEASUREMENT; MICROSCOPES; MICROSCOPIC EXAMINATION; MIRRORS; POLARIZATION; PRISMS;

LIGHT POLARIZATION;

EID: 4344665231     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.05.124     Document Type: Article

References (4)

1. G. Nomarski, Interféromètre à polarisation, French Patent 1.059.123, 1952.
2. Beyer H., Riesenberg H. Handbuch der Mikroskopie. 1988;VEB Verlag Technik, Berlin.
3. R. Danz, et al., Interferenzkontrastanordnung, Patent Specification DD 257 888, 1988.
4. Menzel, et al. Fourieroptik und Holografie. 1973;Springer, Vienna.