3D-features analysis using spectroscopic scatterometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5375, Issue PART 1, 2004, Pages 456-467

  Quintanilha, R ^b   Thony, P ^b   Henry, D ^a   Hazart, J ^b  

^a ST Microlectron Crolles 2 Alliance ^*  (France)

^b CEA GRENOBLE   (France)

Author keywords

2D gratings; Holes matrix; Spectroscopic scatterometry

Indexed keywords

3D-GRATINGS; HOLES MATRIX; SPECTROSCOPIC SCATTEROMETRY;

COMPUTER SOFTWARE; DIFFRACTION GRATINGS; LITHOGRAPHY; OPTIMIZATION; SILICON WAFERS; SPECTROSCOPIC ANALYSIS;

LIGHT SCATTERING;

EID: 4344663359     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.537192     Document Type: Conference Paper

References (6)

1. P. Thony, D. Herisson, D. Henry, E. Severgnini, M. Vasconi, "Review of CD measurement and scatterometry", Characterization and metrology of ULSI technology, Austin, Texas, March 24-28, 2003
2. M. G. Moharam, "Coupled waves analysis of two dimension dielectric gratings", Holograpic optics: design and applications, SPIE vol 383, 1988
3. Lifeng Li,"New formulation of the fourier modal method for crossed surface-relief gratings", J. Opt. Soc. Am, serie A vol. 14 n° 10, oct. 1997
4. D. L. Albritton, A. L. Schmeltekopf and R. N. Zare, "An introduction to the least-squares fitting of spectroscopic data'", in "Molecular Spectroscopy: Modern Research", vol. II, edited by K. N. Rao, Academic Press, London (1976).
5. D. Barchiesi, "Mesures physiques et instrumentation", 178p, Ellipses Marketing édition, 2003
6. Hazart J, G. Grand, P. Thony, D. Herisson, S. Garcia, O. Lartigue, "Spectroscopic ellipsometric scatterometry: sources of errors in Critical Dimension control", Proc. SPIE Santa Clara, february. 2003