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Applied Physics A: Materials Science and Processing

Volumn 79, Issue 4-6, 2004, Pages 1469-1471

Chemistry and microstructure of PLD (Ti, Al)CxN1-x coatings deposited at room temperature

(4) Lackner, J M a Waldhauser, W a Ebner, R a,b Bakker, R J c

a JOANNEUM RESEARCH (Austria)

b MATERIALS CENTER LEOBEN FORSCHUNG GMBH (Austria)

c UNIVERSITY OF LEOBEN (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; ALUMINUM; CARBON; CHEMICAL LASERS; COATINGS; IONIZATION; LASER BEAM EFFECTS; MICROSTRUCTURE; PULSED LASER DEPOSITION; RAMAN SCATTERING; WAVELENGTH DISPERSIVE SPECTROSCOPY; X RAY DIFFRACTION;

ATOMIC MASSES; GAS MIXTURES; MATERIAL ABLATION; WAVELENGTH DISPERSIVE ANALYZERS (WDS);

TITANIUM COMPOUNDS;

EID: 4344651186 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-004-2817-5 Document Type: Conference Paper

Times cited : (17)

References (23)

1
- 0025887935
- M.Y. Al-Jaroudi, H.T.G. Hentzell, S. Gong, A. Bergton: Thin Solid Films 195, 63 (1991)
- (1991) Thin Solid Films , vol.195 , pp. 63
- Al-Jaroudi, M.Y.¹ Hentzell, H.T.G.² Gong, S.³ Bergton, A.⁴

2
- 0025505426
- H.Z. Wu, T.C. Chou, A. Mishra, D.R. Anderson, J.K. Lampert, C. Gujrathi: Thin Solid Films 191, 55 (1991)
- (1991) Thin Solid Films , vol.191 , pp. 55
- Wu, H.Z.¹ Chou, T.C.² Mishra, A.³ Anderson, D.R.⁴ Lampert, J.K.⁵ Gujrathi, C.⁶

3
- 0006003085
- Academic Press, New York
- L.E. Toth: Refractory Materials, vol. 7 (Academic Press, New York 1971)
- (1971) Refractory Materials , vol.7
- Toth, L.E.¹

4
- 4243795275
- O. Knotek, F. Löffier, L. Wolkers: Surf. Coat. Techn. 68/69, 176 (1994)
- (1994) Surf. Coat. Techn. , vol.68-69 , pp. 176
- Knotek, O.¹ Löffier, F.² Wolkers, L.³

5
- 0001197067
- D. Heim, R. Hochreiter: Surf. Coat. Technol. 98, 1553 (1998)
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1553
- Heim, D.¹ Hochreiter, R.²

6
- 0035973321
- K. Kawata, H. Sugimura, O. Takai: Thin Solid Films 390, 64 (2001)
- (2001) Thin Solid Films , vol.390 , pp. 64
- Kawata, K.¹ Sugimura, H.² Takai, O.³

7
- 0022451398
- O. Knotek, M. Böhmer, T. Leyendecker: J. Vac. Sci. Techn. A4, 2695 (1986)
- (1986) J. Vac. Sci. Techn. , vol.A4 , pp. 2695
- Knotek, O.¹ Böhmer, M.² Leyendecker, T.³

8
- 25544459890
- W.-D. Münz: J. Vac. Sci. Techn. A4, 2717 (1986)
- (1986) J. Vac. Sci. Techn. , vol.A4 , pp. 2717
- Münz, W.-D.¹

9
- 0042646654
- E. Bernacchi, A. Ferrero, E. Gariboldi, A. Korovkin, G. Pontini: Metall. Sci. Techn. 14, 3 (1996)
- (1996) Metall. Sci. Techn. , vol.14 , pp. 3
- Bernacchi, E.¹ Ferrero, A.² Gariboldi, E.³ Korovkin, A.⁴ Pontini, G.⁵

10
- 0033373181
- T. Witke, T. Schuelke, J. Berthold, C.F. Meyer, B. Schultrich: Surf. Coat. Techn. 116-119, 609 (1999)
- (1999) Surf. Coat. Techn. , vol.116-119 , pp. 609
- Witke, T.¹ Schuelke, T.² Berthold, J.³ Meyer, C.F.⁴ Schultrich, B.⁵

11
- 0032629206
- D.-Y. Wang, Y.-W. Li, C.-L. Chang: Surf. Coat. Techn. 114, 109 (1999)
- (1999) Surf. Coat. Techn. , vol.114 , pp. 109
- Wang, D.-Y.¹ Li, Y.-W.² Chang, C.-L.³

12
- 0037440648
- S. PalDey, S.C. Deevi: Mat. Sci. Engin. A342, 58 (2003)
- (2003) Mat. Sci. Engin. , vol.A342 , pp. 58
- Paldey, S.¹ Deevi, S.C.²

13
- 0003592140
- John Wiley & Sons, New York
- D.B. Chrisey, G.K. Hubler: Pulsed Laser Deposition of Thin Films (John Wiley & Sons, New York 1994)
- (1994) Pulsed Laser Deposition of Thin Films
- Chrisey, D.B.¹ Hubler, G.K.²

14
- 0037841864
- R. Wuhrer, W.Y. Yeung: Scripta Mater. 49, 199 (2003)
- (2003) Scripta Mater. , vol.49 , pp. 199
- Wuhrer, R.¹ Yeung, W.Y.²

15
- 0033323046
- C.P. Constable, J. Yarwood, W.-D. Münz: Surf. Coat. Techn. 116-119 155 (1999)
- (1999) Surf. Coat. Techn. , vol.116-119 , pp. 155
- Constable, C.P.¹ Yarwood, J.² Münz, W.-D.³

16
- 0036601411
- K.N. Jallad, D. Ben-Amotz: Wear 252, 956 (2002)
- (2002) Wear , vol.252 , pp. 956
- Jallad, K.N.¹ Ben-Amotz, D.²

17
- 0037165927
- J. Robertson: Mat. Sci. Engin. R37, 129 (2002)
- (2002) Mat. Sci. Engin. , vol.R37 , pp. 129
- Robertson, J.¹

18
- 0033366997
- Y.L. Su, W.H. Kao: Wear 236, 221 (1999)
- (1999) Wear , vol.236 , pp. 221
- Su, Y.L.¹ Kao, W.H.²

19
- 0037427437
- P. Panjan, M. Cekada, D. Kek Merl, M. Macek: Vacuum 71, 261 (2003)
- (2003) Vacuum , vol.71 , pp. 261
- Panjan, P.¹ Cekada, M.² Merl, D.K.³ Macek, M.⁴

20
- 0003495856
- International Centre for Diffraction
- JCPDF Powder Diffraction File (International Centre for Diffraction 2002)
- (2002) JCPDF Powder Diffraction File

21
- 0004548794
- Deutscher Verlag für Grundstoffindustrie, Leipzig
- B. Rother, J. Vetter: Plasmabeschichtungsverfahren und Hanstoffschichten (Deutscher Verlag für Grundstoffindustrie, Leipzig 1992)
- (1992) Plasmabeschichtungsverfahren und Hanstoffschichten
- Rother, B.¹ Vetter, J.²

22
- 0007448069
- 292
- S. Amoroso: Appl. Surf. Sci. 138-139, 292 (1999) 292.
- (1999) Appl. Surf. Sci. , vol.138-139 , pp. 292
- Amoroso, S.¹

23
- 4344605171
- J.M. Lackner, W. Waldhauser, R. Ebner, B. Major, T. Schöberl: Thin Solid Films 181-181C, 585 (2004)
- (2004) Thin Solid Films , vol.181 , Issue.181 C , pp. 585
- Lackner, J.M.¹ Waldhauser, W.² Ebner, R.³ Major, B.⁴ Schöberl, T.⁵

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