Preparation of Ba(Pb1-xBix)O3 electrode thin films by rf magnetron sputtering

Ceramics International

Volumn 30, Issue 7, 2004, Pages 1089-1093

  Nishida, T ^a   Kawakami, I ^a   Norimoto, M ^a   Shiosaki, T ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

A. Film; BPBO; BPO; D. PZT; E. Electrode; FeRAM; Magnetron sputtering

Indexed keywords

ANNEALING; CRYSTALLIZATION; ELECTRODES; FERROELECTRICITY; MAGNETRON SPUTTERING; RANDOM ACCESS STORAGE; THIN FILMS;

BPBO; BPO; FERAM; PZT;

BARIUM COMPOUNDS;

EID: 4344627127     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2003.12.023     Document Type: Conference Paper

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