Preparation and properties of a thermal insulating layer and a buffer layer for multilayer pyroelectric film infrared detector

Integrated Ferroelectrics

Volumn 51, Issue , 2003, Pages 73-79

  Wu, Xiaoqing ^a   Yao, Xi ^a   Wang, Minqiang ^a   Gao, Lumei ^a   Ren, Wei ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Buffer layer; Multilayer pyroelectric thin film structure; Pyroelectric infrared detector; Root mean square surface roughness; Thermal insulating layer

Indexed keywords

MULTILAYERS; POROSITY; SILICON COMPOUNDS; SOL-GELS; SURFACE ROUGHNESS; THERMAL DIFFUSION; THERMAL INSULATING MATERIALS; THICKNESS MEASUREMENT; THIN FILMS;

BUFFER LAYERS; MULTILAYER PYROELECTRIC THIN FILM STRUCTURES; PYROELECTRIC INFRARED DETECTOR; THERMAL INSULATING LAYERS;

INFRARED DETECTORS;

EID: 4344624511     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390229833     Document Type: Article

References (5)

1. Tadashi Shiosaki, Proc. The 6th US-Japan seminar on dielec, and piezo, Ceramics, USA, pp. 1-8, 1993.
2. L. Pham, W. Tjhen, C. Ye et al., IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 41(4), 552-555 (1994).
3. B. E. Cole et al., Proc. of Mater, Res. Soc. (MRS), vol. 243. Ferroelectric Thin Eilms II. 1991.
4. Wei Ren, Yun Liu, Xiaoqing Wu, Liangying Zhang, and Xi Yao, Integrated Ferroelectrics 15, 271-279 (1997).
5. Wang Sanhong, Wu Xiaoqing, and Yao Xi, Proc. of 3rd Asian Meeting on Ferroelectrics, 12-15 December, HK, China, 2000.