Characterization of embedded rhomboidal microchannels formation on silicon (100) surface

Journal of the Electrochemical Society

Volumn 151, Issue 8, 2004, Pages

  D'Arrigo, Giuseppe ^a   Spinella, Corrado ^a   Rimini, Emanuele ^a   Rubino, Loredana ^b   Lorenti, Simona ^b  

^a Ist Microelettronica/Microsistemi   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EMBEDDED RHOMBOIDAL MICROCHANNELS; MICRO-FUEL CELLS; MICROFLUIDIC FIELDS; WAFER BONDING;

ANISOTROPY; CONCENTRATION (PROCESS); CRYSTALLINE MATERIALS; DOPING (ADDITIVES); ETCHING; FUEL CELLS; LAYERED MANUFACTURING; MICROMACHINING; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SILICON; TRANSMISSION ELECTRON MICROSCOPY; WSI CIRCUITS;

ELECTROCHEMISTRY;

EID: 4344618117     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1765772     Document Type: Article

References (7)

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