Realization of an optical profiler: Introduction to scanning probe microscopy

American Journal of Physics

Volumn 72, Issue 8, 2004, Pages 1118-1125

  Friedt, J M ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4344602216     PISSN: 00029505     EISSN: None     Source Type: Journal    
DOI: 10.1119/1.1648329     Document Type: Article

References (14)

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