Simulation and realization of a novel micromechanical bi-stable switch

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 451-459

  Freudenreich, Markus ^a   Mescheder, Ulrich ^a   Somogyi, Gergoe ^a  

^a FURTWANGEN UNIVERSITY   (Germany)

Author keywords

Bi stability; FEM simulation; Fibre switch; Micromechanical switch; SOI technology

Indexed keywords

ACTUATORS; AMPLIFICATION; COMPUTER SIMULATION; ELECTROSTATICS; FIBERS; FINITE ELEMENT METHOD; OPTIMIZATION; SILICON SENSORS; SWITCHING;

BI-STABILITY; FIBRE SWITCH; MICROMECHANICAL SWITCH; SOI (SILICON-ON-INSULATOR) TECHNOLOGY;

COMPOSITE MICROMECHANICS;

EID: 4344590013     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.01.034     Document Type: Article

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