Tribological metal-carbon coatings deposited by PVD magnetron sputtering

Applied Surface Science

Volumn 235, Issue 1-2, 2004, Pages 53-59

  Rodriguez R J ^a   Garcia J A ^a   Martinez, R ^a   Lerga, B ^a   Rico, M ^a   Fuentes, G G ^a   Guette, A ^b   Labruguere, C ^b   Lahaye, M ^b  

^a AIN   (Spain)

^b CECAMA   (France)

Author keywords

AES; Carbon; Magnetron sputtering; PVD; Tribology

Indexed keywords

ELASTIC MODULI; FRICTION; HARDENING; MAGNETRON SPUTTERING; PARAMETER ESTIMATION; PHYSICAL VAPOR DEPOSITION; TRIBOLOGY; WEAR OF MATERIALS;

FRICTION LAYERS; SPUTTERING POWER; SUBSTOICHIOMETRY;

INORGANIC COATINGS;

EID: 4344583401     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.05.124     Document Type: Conference Paper

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