PFC emission-reduction strategy for the LCD industry

Journal of the Society for Information Display

Volumn 13, Issue 10, 2005, Pages 841-848

  Nishida, Hideki ^a   Matsumura, Kunio ^b   Kurokawa, Hideaki ^a   Hoshino, Atsushi ^c   Masui, Seishi ^c  

^a HITACHI LTD   (Japan)

^b Ishikawa Plant   (Japan)

^c SHARP CORPORATION   (Japan)

Author keywords

Abatement; C4F3; CF4; CHF3; Emission; Global warning potential; GWP; Inventory guidelines; IPCC; LCD; Liquid crystal display; NF 3; Perfluorocarbon; PFC; SF6; WLICC

Indexed keywords

AC GENERATOR MOTORS; AGGLOMERATION; AIR POLLUTION; INDUCTIVELY COUPLED PLASMA; MANUFACTURE;

ABATEMENT; C4F3; CF4; CHF3; EMISSION; GLOBAL WARNING POTENTIAL; GWP; INVENTORY GUIDELINES; IPCC; LCD; NF 3; PERFLUOROCARBON; PFC; SF6; WLICC;

LIQUID CRYSTAL DISPLAYS;

EID: 43349085938     PISSN: 10710922     EISSN: None     Source Type: Journal    
DOI: 10.1889/1.2121068     Document Type: Conference Paper

References (8)

1. S Matsuno, "Present and future of flat panel display market," 6 DisplaySearch Forum, Japan, Dec, 2003.
2. "2006 IPCC Guidelines for National Greenhouse Gas Inventories" (NGCIP).
3. "Joint statement on the first meeting of the World LCD Industry Cooperation Committee (WLICC)," Tokyo, Japan, July 3, 2001 (http://www jeita or jp/english/press/2001/07/03/index.htm).
4. "Joint statement on the second meeting of the World LCD Industry Cooperation Committee (WLlCC)," Hsinchii, Taiwan, Jan 20, 2003 (http://www jeita or jp/english/press/2003/index.htm).
5. th Annual Earth Technology Forum, Washington DC, April, 2004.
6. th ISESH Conference, Makuhari, Japan, May, 2004.
7. th Annual Earth Technology Forum, Washington DC, April, 2004.
8. K Matsumura et al, "PFC emission reduction strategy for the LCD industry," IDMC2005, Taipei, February, 2005.