Electrically driven optical proximity correction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6925, Issue , 2008, Pages

  Banerjee, Shayak ^b   Elakkumanan, Praveen ^a   Liebmann, Lars W ^a   Culp, James A ^a   Orshansky, Michael ^b  

^a IBM   (United States)

^b UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

Contour based current; Design for manufacturability; Design intent; OPC

Indexed keywords

CONTOUR-BASED CURRENT; DESIGN FOR MANUFACTURABILITY; DESIGN-INTENT;

ALGORITHMS; COMPUTATIONAL COMPLEXITY; ERROR CORRECTION; PRINTED CIRCUIT BOARDS;

PHOTOLITHOGRAPHY;

EID: 43249131736     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.790786     Document Type: Conference Paper

References (8)