Accurate model base verification scheme to eliminate hotspots and manage warmspots

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6925, Issue , 2008, Pages

  Nojima, Shigeki ^a   Kyoh, Suigen ^a   Maeda, Shimon ^a   Inoue, Soichi ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

DfM; Hotspot; LCC; Multiple simulation models; PPE difference; Warmspot

Indexed keywords

HOTSPOT; MULTIPLE SIMULATION MODELS; WARMSPOT;

COMPUTER SIMULATION; INTEGRATED CIRCUIT LAYOUT; MATHEMATICAL MODELS; PATTERN MATCHING; VERIFICATION;

LITHOGRAPHY;

EID: 43249127066     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.771856     Document Type: Conference Paper

References (4)