High power UV q-switched and mode-locked laser comparisons for industrial processing applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6871, Issue , 2008, Pages

  Kauf, Michael ^a   Patel, Raj ^a   Bovatsek, Jim ^a   Gries, Wolfgang ^a  

^a Spectra Physics Lasers Division   (United States)

Author keywords

Laser; Microelectronics; Micromachining; Mode locked; Polyimide; Q switched; UV

Indexed keywords

INDUSTRIAL PROCESSING; PICOSECOND LASERS; PROCESSING EFFICIENCY; SYSTEMATIC COMPARISON;

INDUSTRIAL APPLICATIONS; LASER MODE LOCKING; MANUFACTURE; MICROELECTRONICS; MICROMACHINING; POLYIMIDES; THICKNESS MEASUREMENT; WAVELENGTH;

Q SWITCHED LASERS;

EID: 43049181577     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.775238     Document Type: Conference Paper

References (8)