Micro-patterning of 0.70Pb(Mg1/3Nb2/3)O3-0.30PbTiO3 single crystals by ultrasonic wet chemical etching

Materials Letters

Volumn 62, Issue 17-18, 2008, Pages 3127-3130

  Peng, Jue ^a   Chao, Chen ^a   Dai, Jiyan ^a   Chan, Helen L W ^a   Luo, Haosu ^b  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

MEMS; PMN PT; Single crystals; Wet chemical etching

Indexed keywords

ACTIVATION ENERGY; MAGNESIUM COMPOUNDS; MEMS; THERMAL EFFECTS; WET ETCHING;

ETCHING MASK; ETCHING RATES; ROOM TEMPERATURE; ULTRASONIC BATH;

SINGLE CRYSTALS;

EID: 43049162854     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2008.02.003     Document Type: Article

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