Fabrication of a new micro bio chip and flow cell cytometry system using Bio-MEMS technology

Microelectronics Journal

Volumn 39, Issue 5, 2008, Pages 717-722

  Byun, Insoo ^a   Yang, Jooran ^a   Park, Sekwang ^a  

^a Kyungpook National University   (South Korea)

Author keywords

BOEM (buffered oxide etchant method); DNA (deoxyribo nucleic acid); ECDM (electro chemical discharge method); MEMS (micro electro mechanical system); UVAM (UV sensitive adhesives method)

Indexed keywords

FLOW CYTOMETRY; MEMS; MICROFLUIDICS; SIGNAL PROCESSING;

BUFFERED OXIDE ETCHANT METHOD (BOEM); ELECTRO CHEMICAL DISCHARGE METHOD (ECDM);

BIOCHIPS;

EID: 43049155960     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.12.004     Document Type: Article

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