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Volumn 6799, Issue , 2008, Pages

Novel electro magnetic micro pump

Author keywords

Micro actuator; Micro coil; Micro pump; Micro valve; PDMS; Polymer magnets; Soft lithography

Indexed keywords

BIOCHIPS; COPPER; ELECTROFORMING; MAGNETIC DEVICES; MEMS; MICROACTUATORS; ORGANIC POLYMERS;

EID: 43049132842     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.759486     Document Type: Conference Paper
Times cited : (9)

References (8)
  • 1
    • 43049147234 scopus 로고    scopus 로고
    • M. Feldmann, S. Büttgenbach: Novel Fabrication Processes for Polymer Magnets and their Utilization to Design Versatile Electro Magnetic Micro Actuators, Eurosensors2005, pp. WC6f.
    • M. Feldmann, S. Büttgenbach: Novel Fabrication Processes for Polymer Magnets and their Utilization to Design Versatile Electro Magnetic Micro Actuators, Eurosensors2005, pp. WC6f.
  • 3
    • 0032291621 scopus 로고    scopus 로고
    • Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices
    • J. Y. Park and M.G. Allen, "Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices", J. Micromech. Microeng., vol 8, pp. 307-316.
    • J. Micromech. Microeng , vol.8 , pp. 307-316
    • Park, J.Y.1    Allen, M.G.2
  • 4
    • 12344262702 scopus 로고    scopus 로고
    • Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems
    • N. Damean, B.A. Parviz, J.N. Lee, T. Odom and G.M. Whiteside, "Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems", J. Micromech. Microeng. 2005, vol 15, pp. 29-34.
    • (2005) J. Micromech. Microeng , vol.15 , pp. 29-34
    • Damean, N.1    Parviz, B.A.2    Lee, J.N.3    Odom, T.4    Whiteside, G.M.5
  • 5
    • 43049098371 scopus 로고    scopus 로고
    • M. Feldmann, S. Büttgenbach: Novel Versatile Electro Magnetic Micro Actuators with Integrated Polymer Magnets: Concept, Fabrication and Test, Actuator 2006, HVG, ISBN 3-933339-08-1, pp. 709-712.
    • M. Feldmann, S. Büttgenbach: Novel Versatile Electro Magnetic Micro Actuators with Integrated Polymer Magnets: Concept, Fabrication and Test, Actuator 2006, HVG, ISBN 3-933339-08-1, pp. 709-712.
  • 6
    • 28444453424 scopus 로고    scopus 로고
    • A novel monolithical micro plunger coil actuator using polymer magnets and double layer micro coils, XVIII
    • Rome
    • M. Feldmann, J. Güttler, J. Eickstädt, S. Büttgenbach: A novel monolithical micro plunger coil actuator using polymer magnets and double layer micro coils, XVIII Eurosensors, Rome, 2004, pp. 34-35.
    • (2004) Eurosensors , pp. 34-35
    • Feldmann, M.1    Güttler, J.2    Eickstädt, J.3    Büttgenbach, S.4
  • 8
    • 0035984039 scopus 로고    scopus 로고
    • Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices
    • J.C. McDonald, G.M. Whitesides: Poly(dimethylsiloxane) as a Material for Fabricating Microfluidic Devices, Accounts of Chemical Research 35 (7), pp. 491-499.
    • Accounts of Chemical Research , vol.35 , Issue.7 , pp. 491-499
    • McDonald, J.C.1    Whitesides, G.M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.