Theoretical and experimental studies of microflows in silicon microchannels

Materials Science and Engineering C

Volumn 28, Issue 5-6, 2008, Pages 910-917

  Renaud, L ^a   Malhaire, C ^a   Kleimann, P ^a   Barbier, D ^a   Morin, P ^a  

^a UNIVERSITÉ DE LYON   (France)

Author keywords

Abacuses; Finite element modelling; Microflow; Microfluidic; Navier Stokes equations

Indexed keywords

CAPILLARY FLOW; FINITE ELEMENT METHOD; MICROMACHINING; NAVIER STOKES EQUATIONS; POTASSIUM HYDROXIDE; SEMICONDUCTING SILICON; THREE DIMENSIONAL;

GAUGED TUBES; PYREX SUBSTRATES; TRAPEZOIDAL MICROCHANNELS;

MICROCHANNELS;

EID: 43049127493     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2007.10.070     Document Type: Article

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