Design and fabrication of polarization-independent micro-ring resonators

Chinese Physics Letters

Volumn 25, Issue 4, 2008, Pages 1333-1335

  Geng, Min Ming ^a   Jia, Lian Xi ^a   Zhang, Lei ^a   Liu, Yu Liang ^a   Yang, Lin ^a   Li, Fang ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PROPAGATION METHOD; FABRICATION; POLARIZATION; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

DEEP ULTRAVIOLET LITHOGRAPHY; EFFECTIVE REFRACTIVE INDEX; FULL-VECTOR BEAM PROPAGATION METHODS; MICRORING RESONATOR (MRR); PHOTONIC WIRE WAVEGUIDES; POLARIZATION INDEPENDENT; POLARIZATION SENSITIVITY; POLARIZATION STATE; POLARIZATION-INSENSITIVE; SILICON ON INSULATOR WAFERS;

REFRACTIVE INDEX;

EID: 43049104681     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/25/4/046     Document Type: Article

References (12)