Physical vapor deposition of copper over Lexan

Thin Solid Films

Volumn 516, Issue 14, 2008, Pages 4535-4540

  Kishor Kumar, K ^a   Mukherjee, S ^a  

^a INSTITUTE FOR PLASMA RESEARCH   (India)

Author keywords

Copper coating; Magnetron sputtering

Indexed keywords

COATINGS; MAGNETRON SPUTTERING; MIRRORS; PHYSICAL VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS;

COPPER COATINGS; LEXAN SURFACE; RADIO-FREQUENCY REFLECTING MIRRORS;

COPPER;

EID: 42949144433     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.05.095     Document Type: Article

References (6)

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2. Mukherjee S., Prokert F., Richter E., and Moller W. Thin Solid Films 445 (2003) 48
3. File no: 04-0836, PCPDF WIN 2.0, Diffraction database of International Centre for Diffraction Data.
4. Williamson G.K., and Hall W.H. Acta Metall. 1 (1953) 22-31
5. Suryanarayana C., and Grant Norton M. X-Ray Diffraction, a Practical Approach (1998), Plenum Press, New York
6. Balzar D. In: Snyder R.L., Bunge H.J., and Fiala J. (Eds). Microstructure Analysis from Diffraction, International Union of Crystallography series (1999), Oxford Univ. Press Inc., New York 94