Picosecond laser micromachining of advanced semiconductor logic devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6871, Issue , 2008, Pages

  Albelo, Jeffrey A ^a   Pirogovsky, Peter Y ^a   O'Brien, James N ^a   Baird, Brian W ^a  

^a Electro Scientific Industries Inc   (United States)

Author keywords

Laser micromachining; Laser processing; Mode locked picosecond solid state lasers

Indexed keywords

LASER MICROMACHINING; LASER PROCESSING; MODE-LOCKED PICOSECOND SOLID STATE LASERS; SEMICONDUCTOR LOGIC DEVICES;

DIELECTRIC MATERIALS; LASER MODE LOCKING; LOGIC DEVICES; MICROMACHINING; PUMPING (LASER);

SEMICONDUCTOR LASERS;

EID: 42949120555     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.772111     Document Type: Conference Paper

References (5)