Enhancement of LED light extraction via diffraction of hexagonal lattice fabricated in ITO layer with holographic lithography and wet etching

Physics Letters, Section A: General, Atomic and Solid State Physics

Volumn 372, Issue 20, 2008, Pages 3738-3740

  Zhang, Xiangsu ^a   Liu, Shou ^a   Liu, Ying ^b   Chen, Xiaoyun ^a   Lin, Han ^a   Ren, Xuechang ^a  

^a XIAMEN UNIVERSITY   (China)

^b NATIONAL KEY LABORATORY FOR REMANUFACTURING   (China)

Author keywords

Diffraction; Guided waves; Holographic lithography; LED; Light extraction; Wet etching

Indexed keywords

COST EFFECTIVENESS; CRYSTAL LATTICES; DIFFRACTION; FABRICATION; GALLIUM NITRIDE; GUIDED ELECTROMAGNETIC WAVE PROPAGATION; HOLOGRAPHY; III-V SEMICONDUCTORS; LIGHT EMITTING DIODES; LITHOGRAPHY; SEMICONDUCTOR JUNCTIONS; WIDE BAND GAP SEMICONDUCTORS;

FABRICATION PROCESS; HIGH BRIGHTNESS LEDS; HOLOGRAPHIC LITHOGRAPHY; INJECTION CURRENTS; LATTICE STRUCTURES; LIGHT EXTRACTION; LIGHT-EXTRACTION EFFICIENCY; SEMI-CONDUCTOR WAFER;

WET ETCHING;

EID: 42749094869     PISSN: 03759601     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physleta.2008.02.014     Document Type: Article

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