Young's modulus and interlaminar fracture toughness of SU-8 film on silicon wafer

Mechanics of Materials

Volumn 40, Issue 8, 2008, Pages 658-664

  Hwang, Shun Fa ^a   Yu, Jia Hong ^a   Lai, Bau Jang ^a   Liu, Hsien Kuang ^b  

^a NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

Interface fracture toughness; Micro cantilever beam; SU 8 photoresist; Young's modulus

Indexed keywords

CANTILEVER BEAMS; ELASTIC MODULI; INTERFACES (MATERIALS); MEMS; MICROMACHINING; SILICON WAFERS;

INTERFACE FRACTURE TOUGHNESS; MICRO-CANTILEVER BEAM; SU-8 PHOTORESIST;

FRACTURE TOUGHNESS;

EID: 42749083431     PISSN: 01676636     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mechmat.2008.02.005     Document Type: Article

References (11)

1. Berry J.P. Determination of fracture energies by the cleavage technique. Journal of Applied Physics 7 (1963) 64-66
2. Breton F.A., and Knauss W.G. Error limitations in the determination of mechanical properties of thin films. Journal of Reinforced Plastics and Composites 16 (1997) 17-32
3. Charalambides P.G., Lund J., Evans A.G., and McMeeking R.M. A test specimen for determining the fracture resistance of biomaterial interfaces. Journal of Applied Mechanics 56 (1989) 77-82
4. de Boer M.P., Kriese M., and Gerberich W.W. Investigation of a new fracture mechanics specimen for thin film adhesion measurement. Journal of Materials Research 12 (1997) 2673-2685
5. Doerner M.F., and Nix W. A method for interpreting the data from depth-sensing indentation instruments. Journal of Materials Research 1 (1986) 601-616
6. Huang Y., Liu C., and Stout M.G. A Brazilian disk for measuring fracture toughness of orthotropic materials. Acta Materialia 44 (1996) 1223-1232
7. Kaldor S.K., and Noyan I.C. Differentiating between elastically bent rectangular beams and plates. Applied Physics Letters 80 (2002) 2284-2286
8. Kiesewetter L., Zhang J., Houdeau D., and Stecborn A. Determination of Young's modulus of micromechanical thin films using the resonance method. Sensors and Actuators A 35 (1992) 153-159
9. Kinbara A., Kusano E., Kamiya T., Kondo I., and Takenaka O. Evaluation of adhesion strength of Ti films on Si(1 0 0) by the internal stress method. Thin Solid Films 317 (1998) 165-168
10. Menningen M., and Weiss H. Application of fracture mechanics to the adhesion of metal coatings on CFRP. Surface and Coatings Technology (1995) 835-840
11. Vlassak J., and Nix W.J. A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin film. Journal of Material Research 7 (1992) 401-413