Thermal conductivity measurement of submicron-thick aluminium oxide thin films by a transient thermo-reflectance technique

Chinese Physics Letters

Volumn 25, Issue 2, 2008, Pages 593-596

  Bai, Su Yuan ^a,b   Tang, Zhen An ^a   Huang, Zheng Xing ^a   Yu, Jun ^a   Wang, Jia Qi ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b LIAONING NORMAL UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; GENETIC ALGORITHMS; OXIDE FILMS; REFLECTION; THIN FILMS;

ALUMINUM OXIDE THIN FILMS; GENETIC ALGORITHM OPTIMIZATION METHOD; MAGNETRON-SPUTTERING; MEASUREMENTS OF; MODEL-BASED OPC; SUBMICRON; THERMAL CONDUCTIVITY MEASUREMENTS; THERMOREFLECTANCE; THREE-LAYER MODELS; TRANSMISSION-LINE THEORY;

UNCERTAINTY ANALYSIS;

EID: 42649128370     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/25/2/065     Document Type: Article

References (13)