Evaluation of fluid flow through micromachined nanoporous membranes using a custom-built automated testing and data acquisition system

2006 6th IEEE Conference on Nanotechnology, IEEE-NANO 2006

Volumn 2, Issue , 2006, Pages 806-809

  Smith, Ross A ^a   Zorman, Christian A ^a   Fleischman, Aaron J ^b   Roy, Shuvo ^b  

^a Case Western Reserve University   (United States)

^b LERNER RESEARCH INSTITUTE   (United States)

Author keywords

MEMS; Nanofluidics, silicon micromachining; Nanoporous membrane

Indexed keywords

AUTOMATION; DATA ACQUISITION; FLOW OF FLUIDS; MICROMACHINING; OXIDE FILMS; PRESSURE TRANSDUCERS;

NANOPOROUS MEMBRANES; NANOSCALE OXIDE FILMS; SILICON MICROMACHINING;

NANOFLUIDICS;

EID: 42549171030     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/nano.2006.247781     Document Type: Conference Paper

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