Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering

Applied Physics Letters

Volumn 92, Issue 16, 2008, Pages

  Pezzi, R P ^a,b   Krug, C ^b   Grande, P L ^b   Da Rosa, E B O ^b   Schiwietz, G ^c   Baumvol, I J R ^b,d  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^c HAHN MEITNER INSTITUT   (Germany)

^d UNIVERSITY OF CAXIAS DO SUL   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

DEPTH PROFILING; KINETIC ENERGY; PROTONS; SCATTERING;

GAUSSIAN APPROXIMATION; HF O2 FILMS; MEDIUM ENERGY ION SCATTERING (MEIS);

ENERGY DISSIPATION;

EID: 42549157975     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2918443     Document Type: Article

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