Optimization of TiO2 films prepared by reactive electron beam evaporation of Ti3O5

Journal of Physics D: Applied Physics

Volumn 41, Issue 9, 2008, Pages

  Duyar, Özlem ^a   Placido, Frank ^b   Zafer Durusoy, H ^a  

^a HACETTEPE UNIVERSITY   (Turkey)

^b UNIVERSITY OF THE WEST OF SCOTLAND   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAMS; EVAPORATION; OPTIMIZATION; SPECTROSCOPIC ELLIPSOMETRY; STOICHIOMETRY; TITANIUM DIOXIDE;

REACTIVE ELECTRON BEAM EVAPORATION; REFLECTANCE SPECTROPHOTOMETRY;

OXIDE FILMS;

EID: 42549094425     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/9/095307     Document Type: Article

References (15)

1. Willey R R 1996 Achieving stable results with titanium dioxide 39th Annual Technical Conf. Proc. Society of Vacuum Coaters pp 207-10
2. 5 and during exposure of the films to the atmosphere Appl. Opt. 42 4580-3
3. 2 deposition results CERAC Coatings Material News 15 I1
4. 2 films Appl. Opt. 27 4920-4
5. 2007 Titanium oxides for optical coating CERAC Coatings Material News http://www.cerac.com/pubs/proddata/tioxides.pdf
6. X films prepared electron-beam evaporation of titanium and titanium suboxides Appl. Opt. 42 4590-3
7. Schiller N, Krug M, Straach S and Neumann M 2002 Deposition of titanium dioxide by high-rate ion-assisted electron beam evaporation 45th Annual Technical Conf. Proc. Society of Vacuum Coaters
8. 2-layers prepared by medium frequency and dc reactiva sputtering 40th Annual Technical Conf. Proc. Society of Vacuum Coaters 505/856-7188
9. Modes T, Scheffel B, Metzner Chr, Zywitzki O and Reinhold E 2005 Structure and properties of titanium oxide layers deposited by reactive plasma activated electron beam evaporation Surf. Coat. Technol. 200 306-9
10. Yang T-S, Shiu C-B and Wong M-S 2004 Structure and hydrophilicity of titanium oxide films by electron beam evaporation Surf. Sci. 548 75-82
11. Jellison G E Jr and Modine F A 1996 Parameterization of the optical functions of amorphous materials in the interband region App. Phys. Lett. 69 371-3
12. Software developed by Mr Andrei Voronov at the Thin Film Centre
13. TFCalc, Software Spectra Inc., Portland, OR, USA http://www.sspectra.com
14. Johnson D W 1975 A Fourier series method for numerical Kramers-Kronig analysis J. Phys. A: Math. Gen. 8 490-5
15. Simmons J H and Potter K S 2000 Optical Materials (San Diego, CA: Academic) pp 50-6