Optical characterization of electronic packages with confocal microscopy

ESTC 2006 - 1st Electronics Systemintegration Technology Conference

Volumn 2, Issue , 2006, Pages 1318-1322

  Luniak, Marco ^a   Höltge, Hermann ^b   Brodmann, Rainer ^b   Wolter, Klaus Jürgen ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

^b NANOFOCUS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONFOCAL MICROSCOPY; MEMS; MICROMECHANICS; SCANNING;

FUNCTIONAL MICROSTRUCTURES; HERMETIC PACKAGES;

ELECTRONICS PACKAGING;

EID: 42549093032     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESTC.2006.280181     Document Type: Conference Paper

References (5)

1. R. Brodmann, T. Warrender, M. Weber; "Applications and limits of optical metrology by the confocal multi-pinhole-technique"; International Conference on Surface Metrology Chemnitz 2004
2. J. Valentin; "Mikrooptiken optisch vermessen"; Mikroproduktion 2/2006
3. M. Hagedorn; "Optische Vermessung technischer Oberflächen" ; technica 1/2006
4. th European Microelectronics and Packaging Conference & Exhibition Friedrichshafen 2003
5. J. Uhlemann, G. Schlottig, S. Schindler, S.Starcke, G. Vollmer, K.-J. Wolter; "Zytotoxizitätsprüfung von Chip-on-Board- Materialienfür medizinische Mikrosysteme"; Workshop Funktionelle Oberflächen für die Medizintechnik Erfurt 2005