Optical heterodyne laser encoder with sub-nanometer resolution

Measurement Science and Technology

Volumn 19, Issue 4, 2008, Pages

  Wu, Chyan Chyi ^a   Hsu, Cheng Chih ^a   Lee, Ju Yi ^b   Chen, Hui Yu ^c   Dai, Ching Liang ^d  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^c Machvision Technology Inc   (Taiwan)

^d NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Heterodyne; Laser encoder; Misalignment; Sub nanometer

Indexed keywords

INTERFEROMETERS; LASER APPLICATIONS; MEASUREMENT THEORY; SYSTEM STABILITY;

HETERODYNE; LASER ENCODER; SUB-NANOMETER;

OPTICAL RESOLVING POWER;

INTERFEROMETERS; LASER APPLICATIONS; MEASUREMENT THEORY; OPTICAL RESOLVING POWER; SYSTEM STABILITY;

EID: 42549087098     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/4/045305     Document Type: Article

References (12)