Optimization of cleaning and aminosilanization protocols for Si wafers to be used as platforms for biochip microarrays by surface analysis (XPS, ToF-SIMS and NEXAFS spectroscopy)

Surface and Interface Analysis

Volumn 40, Issue 3-4, 2008, Pages 180-183

  Graf, Nora ^a   Yeǧen, Eda ^a   Lippitz, Andreas ^a   Treu, Dieter ^a   Wirth, Thomas ^a   Unger, Wolfgang E S ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Aminosilanization; Microarray; NEXAFS; Si wafers; ToF SIMS; XPS

Indexed keywords

AMINES; CHEMISTRY; MICROARRAYS; OPTIMIZATION; X RAY ABSORPTION NEAR EDGE STRUCTURE SPECTROSCOPY;

AMINOSILANIZATION; TIME OF FLIGHT (TOF);

SILICON WAFERS;

EID: 42449161416     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2621     Document Type: Conference Paper

References (9)

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