New applications of porous silicon

Defect and Diffusion Forum

Volumn 134-135, Issue , 1996, Pages 15-24

  Amato, G ^a   Brunetto, N ^a  

^a ISTITUTO ELETTROTECNICO NAZIONALE GALILEO FERRARIS   (Italy)

Author keywords

Micromachining; Porous Silicon; Silicon Sensors

Indexed keywords

EID: 4244097383     PISSN: 10120386     EISSN: 16629507     Source Type: Journal    
DOI: 10.4028/www.scientific.net/ddf.134-135.15     Document Type: Article

References (25)

1. A. Uhlir, Bell Syst Techn. J. 35, 333 (1956).
2. K. Imai, Solid State Electron. 24, 159, (1981).
3. L. T. Canham, Appl. Phys. Lett 57, 1046 (1990).
4. R. L. Smith and S. D. Collins, Jour. Appl. Phys. 71, R1 (1992).
5. J. N. Chazalviel, in "Porous Silicon Science and Technology, edited by J. C. Vial and J. Derrien, Les Editions de Physique (France)-Springer (Germany), 1995.
6. V. Lehmann, J. Electrochem. Soc. 140, 2836 (1993).
7. H. Föll, Appl. Phys. A, 53, 8 (1991).
8. C. Levy-Clement, in "Porous Silicon Science and Technology, edited by J. C Vial and J. Derrien, Les Editions de Physique (France)-Springer (Germany), 1995.
9. A, Halimaoui, ibidem.
10. V. Lehmann and U. Gösele, Appl. Phys. Lett 58, 856 (1991).
11. L. T. Canham, A. G. Cullis, C. Pickering, O. D. Dosser and T. I. Cox, Nature 368, 133 (1994).
12. G. Amato and N. Brunetto, Materials Letten, to be published.
13. W. Theiss, in Festköperprobteme/AdvanceR in Solid State Physics 33, 149, R. Helbig ed. (Vieweg, Braunschweig, Wiesbaden), 1994.
14. W. Theiss, S. Hilbrich, R. Arens-Fischer, M. O. Berger, and H. Monder, to be published on "Structural and Optical Properties of Porous Silicon Nanostructures" edited by O. Amato, C. Delerue, H. J. von Bardeleben, Gordon and Breach, Newark, USA.
15. M. G. Berger, St Fronhoff, W. Theiss, U. Rossow, and H. Münder, in "Porous Silicon Science and Technology, edited by J. C Vial and J. Derrien, Les Editions de Physique (France)Springer (Germany), 1995.
16. H. Seidel, L. Csepregi, A. Heuberger and H. Baumgärtel, J. Electrochem. Soc. 137, 3612, (1990).
17. H. Sandmaier, H. L. Offereins, K. Kühl and W. Lang, Transducers 1991, San Francisco, USA, p. 456.
18. M. Ben-Chorin, A. Kux, and L Schechter, Appl. Phys. Lett. 64, 481, 1994.
19. A. Motohashi, M. Kawakami, H. Aoyagi, A. Kinoshita, and A. Satou, Jpn. J. Appl. Phys. 34, 5840, 1995.
20. R. Angelucci, A. Poggi, L. Dori, Q. Cardinali, F. Cavani, C. Critelli, L. Boarino and O. Amato, presented at the E-MRS Spring Meeting, Strasbourg, France, June 1996.
21. V. Lehmann, presented at the 1995 E-MRS Spring Meeting, Strasbourg, France, to be published on Thin Solid Films.
22. P. Déhu, A. Senes, F. Miserey, Thin sol Films. 255, 321, 1995.
23. W. Lang, to be published on "Structural and Optical Properties of Porous Silicon Nanostructures" edited by Q. Amato, C Delerue, H. J. von Bardeleben, Gordon and Breach, Newark, USA.
24. M. J. Kelly, T. R. Guilinger, D. W. Peterson, M. R. Tuck, J. N. Sweet, Mat Res. Soc. Symp. Proc. 225, 313, (MRS, Pittsburgh, 1991).
25. L. T. Canham, Adv. Mater. 7, N. 12, 1033, 1995.