The grain size in macrocrystalline silicon: Correlation between atomic force microscopy, UV reflectometry, ellipsometry, and X-ray diffractometry

Journal of Non-Crystalline Solids

Volumn 198-200, Issue PART 2, 1996, Pages 867-870

  Bardet, E ^a   Bouree I E ^a,b   Cuniot, M ^a   Dixmier, J ^a   Elkaim, P ^a   Le Duigou, J ^a   Middya, A R ^b   Perrin, J ^b  

^a CNRS   (France)

^b ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; GRAIN SIZE AND SHAPE; OPTICAL PROPERTIES; OPTICAL VARIABLES MEASUREMENT; POLYCRYSTALLINE MATERIALS; REFLECTOMETERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; X RAY DIFFRACTION ANALYSIS;

MICROCRYSTALLINE SILICON; ULTRAVIOLET REFLECTOMETRY;

THIN FILMS;

EID: 4244046062     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-3093(96)00072-5     Document Type: Article

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