Analysis of etched silicon surfaces for trench isolation techniques

Journal of the Korean Physical Society

Volumn 35, Issue SUPPL. 2, 1999, Pages

  Kim, Sang Gi ^a   Kim, Jongdae ^a   Lee, Ju Wook ^a   Roh, Tae Moon ^a   Koo, Jin Gun ^a   Nam, Kee Soo ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4244040258     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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