Chemical Vapor Deposition of Thin Films of Ruthenium and Formation of an Unexpected Byproduct Using Hexafluoro-2-butynetetracarbonyl-ruthenium(0)

Chemistry of Materials

Volumn 4, Issue 4, 1992, Pages 747-749

  Senzaki, Yoshihide ^a   Gladfelter, Wayne L ^a   McCormick, Fred B ^b  

^a UNIVERSITY OF MINNESOTA   (United States)

^b 3M COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4244018764     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm00022a002     Document Type: Article

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