Microstructure of germanium films crystallized by high energy ion irradiation

Thin Solid Films

Volumn 281-282, Issue 1-2, 1996, Pages 10-13

  Nakao, Setsuo ^a   Saitoh, Kazuo ^a   Ikeyama, Masami ^a   Niwa, Hiroaki ^a   Tanemura, Seita ^a   Miyagawa, Yoshiko ^a   Miyagawa, Soji ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

CaF2 substrate; Ge films; Ion beam irradiation; Solid phase epitaxial growth

Indexed keywords

CALCIUM COMPOUNDS; EPITAXIAL GROWTH; FILM GROWTH; GERMANIUM; ION BEAMS; ION BOMBARDMENT; LOW TEMPERATURE OPERATIONS; MICROSTRUCTURE; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPECTROMETRY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

CALCIUM FLUORIDE; CHANNELING TECHNIQUE; ION BEAM IRRADIATION; SOLID PHASE EPITAXIAL GROWTH;

AMORPHOUS FILMS;

EID: 4243841994     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08562-8     Document Type: Article

References (13)

1. J. Nakata, Phys. Rev., B43 (1991) 14643.
2. N. Kobayashi, M. Hasegawa, H. Kobayashi, N. Hayashi, M. Shinohara, F. Ohtani and M. Asari, Nucl. Instr. Meth., B59/60 (1991) 449.
3. A. La Ferla, E. Rimini and G. Ferla, Appl. Phys. Lett., 52 (1988) 712.
4. A. La Ferla, F. Priolo, C. Spinella, E. Rimini, F. Baroetto and G. Ferla, Nucl. Instr. Meth., B39 (1989) 311.
5. A.J. Yu, J.W. Mayer, D.J. Eaglesham and J.M. Poate, Appl. Phys. Lett., 54 (1989) 2342.
6. A.L. Pundsack, J. Appl. Phys., 33 (1962) 2306.
7. T. Asano and H. Ishiwara, Jpn. J. Appl. Phys., 21 (1982) L630.
8. K. Saitoh, H. Niwa, M. Kobayakawa, S. Tanemura, M. Ikeyama, M. Takeda, H. Masuda, Y. Miyagawa, S. Nakamura, S. Miyagawa and K. Yasuda, Rep. Govern. Ind. Res. Inst., Nagoya, 39 (1990) 259.
9. S. Nakao, K. Saitoh, M. Ikeyama, H. Niwa, S. Tanemura, Y. Miyagawa and S. Miyagawa, Jpn. J. Appl. Phys., 33 (1994) 4100.
10. H.C. Lee, T. Asano, H. Ishiwara and S. Furukawa, Jpn. J. Appl. Phys., 27 (1988) 1616.
11. J.S. Im and H.A. Atwater, Appl. Phys. Lett., 57 (1990) 1766.
12. J.H. Shin and H.A. Atwater, Nucl. Instr. and Meth. B80/81 (1993) 973.
13. C. Spinella, F. Priolo, S. Lombardo, S.U. Campisano and E. Rimini, Nucl. Instr. Meth., B59/60 (1991) 363.