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Nuclear Inst. and Methods in Physics Research, B

Volumn 55, Issue 1-4, 1991, Pages 323-327

Negative-ion sources for ion implantation

(2) Holmes, A J T a Proudfoot, G a

a RICARDO UK LTD (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4243825381 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/0168-583X(91)96186-O Document Type: Article

Times cited : (5)

References (10)

1
- 84914276859
- (1981) Indian J. Phys. , vol.55 B , pp. 87
- Dixit¹ Ghosh²

2
- 0004118412
- Cambridge University Press
- (1976) Negative Ions
- Massey¹

3
- 36549104771
- (1989) Rev. Sci. Instr. , vol.60 , pp. 539
- Van Os¹ Kleyn² Lea³ Holmes⁴

4
- 5844275294
- (1986) Rev. Sci. Instr. , vol.57 , pp. 2402
- Holmes¹ Nightingale²

5
- 84914276858
- Proc. 3rd Conf. on Heating in Toroidal Plasmas
- Grenoble, 2nd ed., Commission of European Communities
- (1982) EUR 7979 EN
- Holmes¹ Green² Inman³ Walker⁴ Hampton⁵

6
- 0020497631
- (1983) Rev. Sci. Instr. , vol.54 , pp. 56
- Leung¹ Ehlers² Bacal³

7
- 36549101989
- (1988) Rev. Sci. Instr. , vol.59 , pp. 895
- McAdams¹ Holmes² Nightgale³

8
- 84914276857
- J.W. Kwan, Private communication.

9
- 0024608373
- Development and use of a large area ultralow energy reactive ion beam
- (1989) Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , vol.37-38 B , pp. 103
- Proudfoot¹ Mahony² Perrin³

10
- 30444457834
- Volume production of Li− in a small multicusp ion source
- (1987) Applied Physics Letters , vol.51 , pp. 566
- Walter¹ Leung² Kunkel³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.