Photoinduced volume expansion and contraction in a-Si:H films

Journal of Non-Crystalline Solids

Volumn 299-302, Issue , 2002, Pages 516-520

  Yoshida, N ^a   Sobajima, Y ^a   Kamiguchi, H ^a   Iida, T ^a   Hatano, T ^a   Mori, H ^a   Nakae, Y ^a   Nonomura, S ^a   Itoh, M ^b   Masuda, A ^b   Matsumura, H ^b  

^a GIFU UNIVERSITY   (Japan)

^b JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CHARGE CARRIERS; HYDROGENATION; PHOTODEGRADATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

PHOTOINDUCED VOLUME EXPANSION;

AMORPHOUS SILICON;

EID: 4243706633     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(02)00934-1     Document Type: Article

References (10)